On August 14, CCTV’s Vibrant China Research Tour featured a special report on Dr. He Shaolong, Founder and Chief Scientist of Semixlab’s technology partner, Liufang Technology.

The program highlighted the collaboration between Yongjiang Laboratory and Liufang Technology, focusing on how technological innovation and product development can work together to improve efficiency and reduce costs.

During the program, Dr. He used a simple but vivid analogy to explain the role of semiconductor critical components to a national audience:

“Our products are like dedicated trays for chips.”

These “trays,” technically known as epitaxial trays or coated susceptors, accompany semiconductor wafers through extremely high-temperature and highly corrosive environments during chip manufacturing. Their performance has a direct impact on wafer yield and the stability of the entire production line.

For many years, these critical components were largely supplied by overseas manufacturers, making them a key bottleneck in the domestic semiconductor supply chain.

Seven Years of Innovation: From Academia to Industrialization

In 2018, Dr. He Shaolong left the Chinese Academy of Sciences and founded Liufang Technology in Zhuji, Zhejiang.

At that time, semiconductor epitaxial coating technology involved significant technical barriers and long development cycles, while overseas products dominated the market.

Rather than being deterred by these challenges, Dr. He and his team focused on process innovation and independently developed core technologies including layered deposition and variable-temperature deposition. These technologies addressed longstanding industry challenges such as excessive coating stress and limited service life.

From a small startup team, Liufang Technology has grown to nearly 200 employees, including more than 20 PhD and master's degree holders in its core R&D team. The company has established an integrated production capability covering graphite purification, precision machining, and CVD coating, with an annual production capacity of more than 17,000 coated susceptors.

A Major Milestone in 2025: From Domestic Substitution to a Key Supply Partner

In 2025, Liufang Technology achieved a significant milestone in the field of SiC-coated susceptors for LED epitaxy, making the transition from domestic substitution to becoming a key supplier.

With its strong technological capabilities, the company has been recognized as a High-Tech Enterprise and a national-level “Little Giant” Enterprise, a designation for specialized and innovative SMEs.

As Chief Scientist, Dr. He Shaolong has also led National Key R&D Program projects focused on the independent and controllable development of China's semiconductor supply chain, helping accelerate the transition of advanced technologies from laboratory research to industrial applications.

Industry-Academia Collaboration: Joint Innovation with Yongjiang Laboratory

The rapid growth of Liufang Technology has also benefited from its close collaboration with Yongjiang Laboratory.

To address challenges including limited corporate scale, high investment requirements for advanced equipment, and difficulties in attracting high-level technical talent, Yongjiang Laboratory invited Liufang Technology to jointly establish a Thermal Field Materials Innovation Center.

The center focuses on fundamental research and industrial applications of ultra-high-purity, high-temperature-resistant, and corrosion-resistant ceramic coating materials, including silicon carbide (SiC) and tantalum carbide (TaC) coatings.

Under this collaborative model, the laboratory contributes technology and talent, while the company provides application scenarios and market access. This approach helped shorten the company's technology exploration cycle by at least three years and significantly improved the efficiency of technological innovation and commercialization.

With the support of Yongjiang Laboratory, Liufang Technology achieved major breakthroughs in the atomic-level preparation of SiC coating materials, with product performance reaching internationally advanced levels.

Within less than three years, its products entered the supply chains of several leading companies, including BYD and TDK, demonstrating the growing market recognition of its advanced coating technologies.

New Manufacturing Base Accelerates Expansion

Liufang Technology has been established in Zhuji for many years. Its new 100-mu headquarters and manufacturing base has entered the equipment installation and commissioning stage.

The new facility is planned to include two power-device packaging and testing production lines and one module assembly line, with phased production expected to begin in the second half of 2026.

Once fully operational, the project is expected to achieve an annual production capacity exceeding RMB 600 million, further strengthening the company’s position in major end markets including new energy vehicles and photovoltaic inverters.

Advancing SiC and TaC Coating Technologies

Dr. He Shaolong stated that Liufang Technology will continue to focus on ultra-high-purity, high-temperature-resistant, and corrosion-resistant ceramic coating materials, particularly silicon carbide (SiC) and tantalum carbide (TaC).

The company aims to become a leading supplier in China and a globally competitive technology provider, contributing to the continued localization and advancement of third-generation semiconductor materials.

Related Links

• Explore Our SiC Coated Products：https://www.semixlab.com/Cvd-coating

• Learn More About Our R&D and Quality Control Capabilities：https://www.semixlab.com/Our-team--rd-power

• View Company Certifications and Qualifications：https://www.semixlab.com/Overview-heritage

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