Access our comprehensive technical library. From precise engineering specifications to international quality certifications, we provide the transparency required for mission-critical semiconductor supply chains.
What’s Inside: A collection of our core invention patents (8+), proving our original mastery of CVD Gradient Coatings and Solid SiC technology. These documents verify our technical independence and IP compliance.
| Technical Category | Patent Title (Invention) | Patent No. | Key Inventor | Strategic Value |
| TaC Coating | Graphite component with TaC/Ta2C gradient coating and its preparation method | ZL202411703774.0 | Prof. Shaolong He | Enhances thermal shock resistance and adhesion for high-temp reactors. |
| TaC Equipment | Apparatus for preparing sintered TaC coating on graphite substrate | ZL202110992463.0 | L.W. Zhou | Automated system for high-purity Tantalum Carbide coating. |
| SiC Composite | A CVD method for preparing SiC composite coating on single/poly-crystalline silicon | ZL202410071607.2 | Prof. Shaolong He | Critical for high-end epitaxy susceptors and wafer carriers. |
| New Materials | Silicon Carbide / Graphite composite material and its preparation method | ZL202410990154.3 | Prof. Shaolong He | Next-gen high-strength, high-purity semiconductor base materials. |
| Low-Temp CVD | Method for low-temperature preparation of SiC coating on metal surfaces | ZL202311149201.3 | Prof. Shaolong He | Expands SiC protection to heat-sensitive metal components. |
| Low-Temp CVD | Apparatus for low-temperature preparation of SiC coating on metal surfaces | ZL202110992466.4 | L.N. Ding | Specialized hardware for precision low-temperature coating. |
| C/C Composites | Method for preparing SiC coating for Carbon-Carbon (C/C) composites | ZL202410002048.X | Prof. Shaolong He | Improves oxidation resistance for long-life thermal field components. |
| Advanced R&D | Apparatus for preparing Silicon Carbide sponge by Chemical Vapor Deposition | ZL202210703163.0 | Prof. Shaolong He | Proprietary equipment for developing porous semiconductor structures. |







