Quartz Parts

Quartz is still everywhere in semiconductor processing. It’s not new, but it’s reliable, and most fabs are familiar with how it behaves. As long as purity is controlled, it works well in diffusion, oxidation, and cleaning steps.

A lot of quartz parts go into furnace systems or PECVD tools. The main expectation is stability — not necessarily long lifetime, but predictable performance. That’s usually good enough for many standard processes.

Of course, quartz does have its limits. It can wear out faster in certain conditions, especially compared with SiC. But because it’s relatively easy to source and not too expensive, people still use it quite a lot.