SiC Wafer Boat
Semixlab SiC Wafer Boats are purpose-built for demanding high-temperature diffusion in semiconductor manufacturing. Crafted from dense sintered silicon carbide, they offer exceptional strength, chemical inertness, and particle-free performance up to 1,800°C. We provide standard and custom specifications with rapid delivery, ensuring reliable wafer handling and extending product life for your critical processes.
Description
Ⅰ. Optimize Your High-Temperature Diffusion Processes with Semixlab SiC Wafer Boats
In the demanding world of semiconductor manufacturing, the integrity and purity of your wafers during high-temperature diffusion processes are paramount. Semixlab offers SiC (Silicon Carbide) Wafer Boats engineered to meet the most stringent requirements of advanced fabrication, ensuring reliable performance and maximizing your process yields.

Ⅱ. SiC Wafer Boat Applications:
Our SiC horizontal square wafer boats are the ideal solution for securely holding wafers during critical high-temperature diffusion processes. Designed for stability and precision, they are an indispensable component in facilities requiring superior thermal and chemical resistance for their wafer handling needs.
Ⅲ. Essential Features for Demanding Environments:
Semixlab SiC Wafer Boats are manufactured to possess key attributes vital for success in high-temperature semiconductor applications:
●Exceptional High-Temperature Strength: Our SiC wafer boats maintain their structural integrity and shape even under extreme thermal stress, preventing warping or deformation that could compromise wafer alignment and process consistency.
●Superior High-Temperature Chemical Stability: Built from advanced silicon carbide, our boats exhibit outstanding resistance to corrosive gases and chemicals commonly used in diffusion furnaces, minimizing contamination risks and extending product lifespan.
●Zero Particle Generation: We understand that microscopic particles can severely impact device performance. Our meticulous manufacturing processes ensure that Semixlab SiC wafer boats are virtually free of particle shedding, safeguarding your valuable wafers from contamination.
Ⅳ. Why Choose Semixlab for Your Wafer Boats?
Partnering with Semixlab for your SiC wafer boat needs means choosing a commitment to quality, reliability, and precision.
✔Diverse Specifications & Customization: We offer a wide range of standard SiC wafer boat specifications to fit various furnace types and wafer sizes. Furthermore, our experienced engineering team provides comprehensive customization services to design and manufacture bespoke solutions tailored precisely to your unique process requirements.
✔Premium Dense Sintered Silicon Carbide Material: Our SiC wafer boats are fabricated from dense sintered silicon carbide material, renowned for its superior mechanical properties, thermal conductivity, and purity, which are critical for demanding semiconductor applications.
✔Extended Lifespan: Thanks to the inherent durability and resistance of dense sintered SiC, our wafer boats offer a long-lasting operational life, significantly reducing replacement frequency and lowering your overall cost of ownership.
Specifications
| Physical properties of Sintered Silicon Carbide | |
| Property | Typical Value |
| Chemical Composition | SiC>95%, Si<5% |
| Bulk Density | >3.07 g/cm³ |
| Apparent porosityApparent porosity | <0.1% |
| Modulus of rupture at 20℃ | 270 MPa |
| Modulus of rupture at 1200℃ | 290 MPa |
| Hardness at 20℃ | 2400 Kg/mm² |
| Fracture toughness at 20% | 3.3 MPa · m1/2 |
| Thermal Conductivity at 1200℃ | 45 w/m·K |
| Thermal expansion at 20-1200℃ | 4.5 1 ×10-6/℃ |
| Max.working temperature | 1400℃ |
| Thermal shock resistance at 1200℃ | Good |
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