SiC Ceramic Boat

The SiC ceramic boat is a high-temperature-resistant component made from high-purity silicon carbide, widely used in semiconductor, photovoltaic, and material heat treatment applications. It offers exceptional thermal stability (withstanding temperatures above 1600°C), low thermal expansion, and outstanding thermal shock resistance, along with strong corrosion resistance in acidic and alkaline environments. Its unique structural design ensures minimal deformation under extreme heat while maintaining excellent thermal conductivity and insulation. It is particularly suitable for precision processes such as wafer diffusion, oxidation process and MOCVD epitaxial growth. The product is precision machined with high surface finish, and can be customized in different sizes and groove types, which can significantly improve process uniformity and extend service life. It is an ideal choice to replace traditional quartz and graphite devices.

Application:

SiC Ceramic Boat is a high-temperature carrier device made of silicon carbide material, which is widely used in semiconductor manufacturing, photovoltaic industry and high-temperature heat treatment field. In the diffusion, oxidation, annealing and other processes, it can stably carry silicon wafers, wafers and other materials, and is one of the core consumables for the production of high-end electronic components.

Services that can be provided:

customer application scenario analysis, matching materials, technical problem solving.

Company profile:

Semixlab has 2 laboratories, a team of experts with 20 years of material experience, with R&D and production, testing and verification capabilities.

Technical Parameters

Main application fields

Ecological chain verification endorsement

Semixlab SiC ceramic boat's ecological chain verification covers raw materials to production, has passed international standard certification, and has a number of patented technologies to ensure its reliability and sustainability in the semiconductor and new energy fields.

Typical application process

Raw Material Preparation (SiC powder selection) → Molding process → Drying and degreasing → sintering → Post-processing(Surface treatment: Polishing or coating) → Quality Control and Testing

With the rapid development of semiconductor, photovoltaic and new energy industries, the market demand for high-purity SiC ceramic boats will continue to expand. Semixlab SiC ceramic boat is gradually replacing imports in high-end application fields by improving material purity, optimizing coating processes and breaking through large-size manufacturing technology.

For detailed technical specifications, white papers, or sample testing arrangements, please contact our Technical Support Team to explore how Semixlab can enhance your process efficiency.

Semixlab SiC Ceramic Boat core advantages

Superior Thermal Shock Resistance

Silicon carbide material itself has an extremely low thermal expansion coefficient, which enables SiC ceramic boats to maintain structural integrity under rapid temperature changes and avoid cracking or deformation. This feature is particularly suitable for rapid temperature rise and fall processes, greatly extending the service life of the product and reducing the customer's replacement frequency and maintenance costs.

High chemical stability

SiC ceramic boats have strong resistance to acids, alkalis and corrosive gases, and can maintain stable performance even in high-temperature corrosive environments. This advantage makes it an irreplaceable carrier tool in chemical vapor deposition (CVD) or diffusion processes, ensuring process consistency and product yield.

High Mechanical Strength & Wear Resistance

Compared with traditional quartz or graphite materials, silicon carbide ceramics have higher hardness, outstanding wear resistance, and can withstand high-frequency handling and friction. In the continuous production process, the product is not easy to produce particle shedding, avoiding pollution problems caused by material loss, and is particularly suitable for semiconductor manufacturing links with strict cleanliness requirements.

Energy Efficiency & Superior Thermal Conductivity

The thermal conductivity of SiC materials is much higher than that of ordinary ceramics, which can achieve fast and uniform heat transfer, significantly improve process efficiency and reduce energy consumption. This feature helps customers shorten production cycles while reducing energy consumption, which is in line with the industry development trend of green manufacturing.