High Purity SiC Wafer Boat

Optimized Thermal Field Solutions for 4-12 Inch Fabrication

Why Leading Fabs are Switching from Quartz to SiC Boats?

Superior to quartz that inevitably fails at 1150∘C due to devitrification, our SiC boats maintain absolute geometric precision under extreme thermal stress. Thanks to its high density, the CVD SiC matrix stops particle shedding in its tracks. It's built specifically to handle the 'zero-excursion' demands of today’s sub-micron fabrication processes.

Our components handle aggressive HF/HNO3 cleaning much better than quartz, lasting longer and driving down replacement costs. With optimized thermal management for rapid, even heating, they provide the process stability needed for 4-inch to 12-inch wafers in high-volume production.

Expert Insights

Unlike traditional graphite boats that lean heavily on surface-level coatings, Semixlab’s monolithic SiC-on-SiC architecture eliminates the structural "mismatch" between substrate and skin. By unifying the expansion coefficients across the entire unit, we’ve solved the chronic industry headache of delamination. For 8-inch and 12-inch high-volume fabs, this isn't just a material upgrade—it's a TCO revolution. With a service life 5x exceeding standard quartz, our solid SiC boats transform a consumable cost into a long-term production asset.

Technical Specs & Customization

We can tailor everything to fit your specific furnace setup—whether horizontal or vertical—and adjust to your exact wafer handling needs.

Typical Applications 

Our SiC boats are built for the toughest fab conditions. They hold their shape perfectly during Si/SiC Epitaxy despite H2 etching, and their high purity is a lifesaver for Diffusion processes where contamination is a risk. For ALD and LPCVD, they act as a stable thermal mass to ensure the film deposits evenly across all wafers.

Schematic of CVD process for SiC Boat coating, ensuring 7N purity and uniform density

1) 7N Ultra-High Purity (CVD Encapsulation) Instead of basic coating, we use a high-density CVD SiC encapsulation to lock in a global purity of 99.99999%. For high-voltage power devices like IGBTs and MOSFETs, this isn't optional—it’s the only way to hard-stop metallic impurities (Fe, Ni, Cu) from triggering catastrophic leakage currents.

2) Precision-Engineered Slot Geometry We don’t do "one size fits all." Whether you need a standard V-groove or a specialized U-slot for fragile, thin-wafer handling, our CNC centers hold tolerances to a tight ±0.05mm. This extreme precision kills wafer rattling at the source and mitigates edge-stress during high-speed robotic transfers.

3) Optimized Duty Cycle & CTE Matching The biggest failure point in coated boats is delamination. We’ve solved this by tuning the coating’s bonding strength to perfectly mirror the substrate’s Coefficient of Thermal Expansion (CTE). The result? A boat that survives relentless thermal cycling in Oxidation and Diffusion furnaces without the coating flaking or peeling away from the base material.