Quartz wafer boat carrier

Semixlab quartz boat support is a high-performance carrying tool designed for the semiconductor, photovoltaic, LED and precision electronics industries. It is made of high-purity synthetic quartz material. As the core consumables in high-temperature processes, quartz boat supports have become the ideal carriers for wafers, silicon wafers, glass substrates and other precision components in diffusion, annealing, oxidation, CVD (chemical vapor deposition) and other processes due to their excellent thermal stability, chemical inertness and ultra-long service life, helping customers achieve efficient and stable production processes.

Application scenarios or equipment: 

Semiconductor diffusion, annealing, oxidation, and CVD (Chemical Vapor Deposition) process.

Company Strength

Semixlab Technology Co.,Ltd has 2 R&D centers, 2 production bases, 12 production lines, 150+ employees, and R&D investment accounts for more than 30%. Our product layout is mainly used in LED, IC integrated circuit, third generation semiconductor, photovoltaic and other industries. Semixlab has strong R&D, production and integrated testing and verification capabilities. At the same time, we are constantly improving our technology and equipment with the investment of tens of millions per year.

Customized services

To meet diverse needs, we provide flexible customization services and support the following parameter adjustments:

Size specifications: Adapt to different substrates such as 8 inches and 12 inches, or customize special-shaped structures according to customer drawings.

Surface treatment: Optional sandblasting, coating (such as silicon carbide coating) and other processes to enhance applicability in specific scenarios.

Accessory integration: Can be matched with quartz pillars, baffles and other components to form a complete carrying system.

Quality assurance system

Raw material testing: Imported high-purity quartz sand, analyzed by ICP-MS (inductively coupled plasma mass spectrometry).

Process control: CNC precision machining + automated testing, key dimension tolerance ≤±0.05mm.

Clean packaging: Class 100 ultra-clean environment packaging to avoid transportation contamination.

Typical application scenarios

Semiconductor manufacturing: used for high-temperature annealing, oxidation and thin film deposition processes of wafers in diffusion furnaces and vertical furnaces.

Photovoltaic industry: Carrying and transmission of PERC and TOPCon cells in PECVD, phosphorus diffusion and other processes.

LED epitaxy: Precise positioning and high-temperature epitaxial growth of sapphire substrates in MOCVD equipment.

Research field: Material sintering and testing in laboratory high-temperature furnaces and vacuum environments.

1. Excellent high temperature resistance

The quartz boat support can withstand high temperature environments above 1200℃ for a long time, with an extremely low thermal expansion coefficient (about 5.5×10⁻⁷/℃). It can still maintain structural stability under rapid cooling and heating conditions, avoiding cracking or deformation caused by thermal stress, and ensuring process repeatability.

2. Ultra-high purity and chemical inertness

Made of 99.99% or more high-purity quartz sand, no precipitation, no pollution, effectively prevent metal ions or particulate impurities from contaminating the wafer surface at high temperature, especially suitable for advanced processes with strict cleanliness requirements (such as chip manufacturing below 7nm).

3. Precision structural design

The surface of the boat support is polished with high precision (roughness Ra≤0.2μm), equipped with a patented slot structure, which can stably carry substrates of various sizes (such as 8/12-inch wafers), ensuring uniform heating and gas circulation, and improving process uniformity.

4. Ultra-long service life

Compared with traditional graphite or ceramic carriers, quartz materials have strong corrosion resistance, low loss rate in acidic/alkaline atmospheres, and continuous use cycle can reach 12-24 months, significantly reducing customer comprehensive costs.