Quartz Disk for Semiconductor Process

The semiconductor industry demands components of exceptional purity and precision. Quartz disks are a cornerstone in this field, serving a critical role in various high-temperature and chemically demanding semiconductor fabrication processes. Semixlab Quartz Disk for Semiconductor Process is engineered from high-purity synthetic fused silica (SiO2) to deliver exceptional thermal stability, chemical resistance, and ultra-low contamination.These Semiconductor Quartz disks are used across CVD thin film deposition, ALD, PVD sputtering,diffusion/anneal, RTP, plasma etch (RIE/ICP) support.

Material Properties and Characteristics

Our semiconductor quartz disks are fabricated from high-purity fused quartz, a material renowned for its exceptional properties. The key characteristics of our quartz disks include:

● High Purity: Containing minimal impurities, our quartz disks prevent contamination of sensitive semiconductor wafers, which is essential for maintaining device integrity and yield.

● Excellent Thermal Stability: With a low coefficient of thermal expansion, quartz disks can withstand extreme temperature fluctuations without cracking or warping. This makes them ideal for high-temperature processes like annealing, diffusion, and oxidation.

● Chemical Inertness: Quartz is highly resistant to most acids and chemicals used in semiconductor processing, including hydrofluoric acid (HF) and sulfuric acid (H2SO4). This chemical inertness ensures a stable and non-reactive environment for the wafers.

● High Transparency: Fused quartz has high transparency to ultraviolet (UV) light, which is crucial for photolithography and other optical processes.

Our quartz disks are available in a range of sizes and thicknesses, with typical parameters including:

● Purity: >99.995%

● Thermal Expansion Coefficient: ~0.54 x 10−6/°C (at 20-300°C)

● Softening Point: ~1600°C

● Available Diameters: Up to 300mm

Applications in Semiconductor Manufacturing

High-purity quartz disks are indispensable in several key semiconductor processes. Their specific applications include:

● CVD (Chemical Vapor Deposition): Quartz disks are used as susceptor plates or liners in CVD reactors. Their thermal stability and chemical inertness ensure uniform heating and a contamination-free environment for thin film deposition processes.

● PVD (Physical Vapor Deposition): In PVD processes like sputtering, quartz disks serve as target backings or substrate holders. They can withstand the high kinetic energy of the deposition process while maintaining dimensional stability.

● Oxidation and Diffusion: As a liner for furnaces or as a wafer boat component, quartz disks are integral to high-temperature oxidation and diffusion processes. They prevent metal contamination from the furnace walls from reaching the silicon wafers.

● Annealing: Quartz disks provide a clean and stable surface for thermal annealing, a process used to repair crystal lattice damage and activate dopants in semiconductor devices.

Semixlab Advantage: Your Partner in Semiconductor Fabrication

At Semixlab, we are more than just a semiconductor quartz disk manufacturer. We are a partner dedicated to your success, offering a suite of services designed to streamline your operations and enhance your process efficiency.

● Customization: We understand that every fabrication process is unique. Our team can manufacture custom quartz disks tailored to your specific dimensional, purity, or application requirements.

● Technical Consultation: Our technical experts provide in-depth consultations to help you select the ideal quartz product for your specific process, ensuring optimal performance and longevity.

● Rapid Prototyping and Sample Service: We offer fast turnaround times for prototypes and samples, allowing you to test and validate our products quickly and efficiently. This accelerates your R&D cycles and reduces time-to-market.

For process engineers and buyers seeking reliable carrier plates, isolation shields, and optical-grade supports, Semixlab provides tight-tolerance, low-defect quartz disks that improve yield and extend tool uptime.We sincerely look forward to becoming your long-term partner in China.