Quartz Cassette Wafer Boat

Quartz Cassette Wafer Boat for Semiconductor Diffusion & Thermal Processing

High Purity Quartz Wafer Carrier for Oxidation, Diffusion and LPCVD Processes

At Semixlab, we specialize in manufacturing high-performance Quartz Cassette Wafer Boats designed for advanced semiconductor thermal processing applications. With extensive experience in semiconductor materials and precision quartz components, we provide high-purity quartz wafer carriers engineered to support demanding processes including thermal oxidation, dopant diffusion, LPCVD deposition, and high-temperature annealing.

What Is Quartz Cassette Wafer Boat?

A Quartz Cassette Wafer Boat, also known as a Quartz Wafer Boat, Quartz Wafer Carrier, or Quartz Cassette, is a high-purity quartz component used to hold multiple silicon wafers during semiconductor thermal processing.

Installed inside:

● Vertical Diffusion Furnaces;

● Horizontal Furnace Systems;

● LPCVD Equipment;

● Oxidation Furnaces;

● Annealing Systems;

the wafer boat precisely separates and supports wafers while allowing uniform gas flow and heat transfer.

During semiconductor manufacturing, hundreds of wafers may undergo high-temperature processing simultaneously. Therefore, the wafer boat must provide:

● Stable mechanical support;

● Precise wafer spacing;

● Low particle generation;

● Excellent chemical resistance;

● Extremely low contamination levels.

High Purity Quartz Material Characteristics

Semixlab Quartz Cassette Wafer Boats are manufactured using semiconductor-grade fused quartz (SiO₂), selected for its outstanding thermal and chemical performance.

The quartz material is carefully controlled to achieve:

● Ultra-high purity;

● Low metallic contamination;

● Excellent thermal shock resistance;

● Long service lifetime under high-temperature environments.

Typical Material Properties:

Applications in Semiconductor Manufacturing

Thermal Oxidation Process

Quartz Cassette Wafer Boats are widely used in thermal oxidation furnaces for growing silicon dioxide (SiO₂) layers on silicon wafers.

Dopant Diffusion Process

The Quartz Cassette Wafer Boat is a key component in semiconductor diffusion furnaces used for dopant introduction.

LPCVD Thin Film Deposition

Quartz wafer boats are extensively used in Low Pressure Chemical Vapor Deposition (LPCVD) systems.

Typical deposited films include:

● Silicon Nitride (Si₃N₄);

● Polycrystalline Silicon;

● Silicon Oxide.

Why Choose Semixlab?

1. Semiconductor-Grade Quartz Material Selection

Semixlab uses carefully selected high-purity quartz materials with strict control of:

● SiO₂ purity;

● Metallic contamination;

● Bubble defects;

● OH content.

This ensures reliable performance in semiconductor thermal environments.

2. Precision Quartz Fabrication Capability

Our quartz wafer boats are manufactured through advanced processes including:

● Precision quartz forming;

● High-temperature shaping;

● Dimensional machining;

● Surface finishing;

● Cleaning and inspection.

3. Strict Quality Control

Each Quartz Cassette Wafer Boat undergoes inspection procedures including:

● Dimensional inspection;

● Visual defect inspection;

● Surface quality evaluation;

● Cleanliness verification.

4. Customization for Different Furnace Systems

Semixlab provides customized quartz wafer boats compatible with various semiconductor processes and equipment platforms. Customization options include:

Wafer size:

● 4 inch

● 6 inch

● 8 inch

● 12 inch

Structure:

● Vertical quartz boat;

● Horizontal quartz boat;

● Cantilever quartz boat.

● Slot number and pitch customization.

For semiconductor manufacturers requiring stable wafer handling solutions in oxidation, diffusion, LPCVD and annealing processes, Semixlab Quartz Cassette Wafer Boat provides a dependable foundation for high-yield wafer production.