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Pyrolytic Graphite (PG) Coating

Pyrolytic Graphite (PG) Coating

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Pyrolytic Carbon Coated Graphite Ring
Pyrolytic Carbon Coated Graphite Ring

Pyrolytic Carbon Coated Graphite Ring


Semixlab’s Pyrolytic Carbon Coated Graphite Rings are engineered for high-temperature semiconductor epitaxy environments where thermal stability, purity control, and process consistency are critical. Designed with a dense pyrolytic carbon coating on high-purity graphite substrates, these components provide excellent chemical resistance, low particle generation, and superior thermal uniformity during wafer processing. Contact Semixlab today to explore customized pyrolytic carbon coated graphite solutions for your semiconductor epitaxy applications.

Description

The graphite ring shown here is used in silicon carbide crystal growth equipment. It is generally installed around the thermal field area inside the furnace and works together with other graphite parts during the crystal growth process.

This type of ring is commonly used in PVT growth systems where furnace temperature remains extremely high for long periods. Because of the operating environment, users usually replace the ring after a certain number of runs instead of using it permanently.

The base material is machined graphite with a PyC surface layer. Compared with untreated graphite, the coated surface is more stable during high-temperature operation and is less likely to release particles inside the chamber.

In practical production, many customers purchase these rings repeatedly as part of routine furnace maintenance and production planning.

Product Features

SiC crystal growth process

PyC Surface Layer

A pyrolytic carbon coating is applied to the graphite surface to improve stability under high-temperature conditions.

For SiC Crystal Growth

Mainly used in silicon carbide crystal growth furnaces and related thermal field systems.

Stable Surface Condition

The coating helps maintain a cleaner working surface during long heating cycles.

Repeat Batch Production

The same specifications can be supplied continuously for customers operating multiple furnaces.

Machining According to Drawings

Size and structure can be adjusted according to different furnace designs.


Production & Supply

Different furnace structures require different graphite configurations, so most rings are produced according to customer drawings or existing samples.

During manufacturing, dimensions and coating thickness are checked before shipment. For customers using large quantities in continuous production, stable repeatability between batches is usually one of the main concerns.

Some users order only a few pieces for testing, while others purchase larger quantities regularly for long-term production use.

Semixlab

Semixlab supplies graphite and coated graphite products used in semiconductor and crystal growth industries. Products can be manufactured according to application requirements, furnace structure, and customer specifications.

Specifications

Technical Information

Pyrolytic Carbon (PyC) Coating Parameter
ItemUnitvalue
Crystal StructureHexagonal
AlignmentOriented or non-oriented along 001 direction
Bulk Densityg/cm3~2.25
MicrostructurePolycrystalline/Multilayer graphene
HardnessGPa1.2
Elastic ModulusGPa11
Typical Thicknessum30±5um
Surface Roughnessum1.5
Product Purityppm≤5ppm
Applications

-Silicon carbide crystal growth

-PVT furnace systems

-Thermal field graphite assemblies

-High-temperature furnace components

-Graphite consumable parts

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