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CMP polishing abrasive
| Place of Origin: | China |
| Brand Name: | Semixlab |
| Model Number: | SXL-1 |
| Certification: | ISO14001, ISO45001, ISO9001 |
| Minimum Order Quantity: | Subject to negotiation |
| Price: | Contact for Customized Quotation |
| Packaging Details: | Standard export package |
| Delivery Time: | 15-30 Days After Order Confirmation |
| Payment Terms: | T/T |
| Supply Ability: | 10 tons/Month |
Description
CMP (Chemical Mechanical Planarization) polishing abrasive is a key material in the fields of semiconductor manufacturing, optical glass, integrated circuits, etc., and achieve nano-level surface flattening through the synergistic effect of chemical corrosion and mechanical grinding.
Application:
CMP polishing abrasives are crucial key materials in the field of integrated circuit manufacturing and can be used in integrated circuit ILD, semiconductor monocrystalline silicon wafers, semiconductor silicon carbide, integrated circuit shallow trench isolation (STI), integrated circuit polysilicon (Poly - Si), integrated circuit metals and metal barrier layers.
Services that can be provided:
customer application scenario analysis, matching materials, technical problem solving.
Company profile:
Semixlab has 2 laboratories, a team of experts with 20 years of material experience, with R&D and production, testing and verification capabilities.
Specifications
Performance Indicators for Ultra-High Purity Series Products
| Parameter | SXL-1 | SXL-2 | SXL-3 | SXL-4 | SXL-5 | SXL-6 | SXL-7 |
| Average SilicaParticle Size/nm | 35±5 | 45±5 | 65±5 | 75±5 | 85±5 | 100±5 | 120±5 |
| Nanoparticle SizeDistribution (PDI) | <0.15 | <0.15 | <0.15 | <0.15 | <0.15 | <0.15 | <0.15 |
| Solution pH | 7.2-7.4 | 7.2-7.4 | 7.2-7.4 | 7.2-7.4 | 7.2-7.4 | 7.2-7.4 | 7.2-7.4 |
| Solid Content/% | 20.5±0.5 | 20.5±0.5 | 20.5±0.5 | 20.5±0.5 | 20.5±0.5 | 20.5±0.5 | 20.5±0.5 |
| Appearance | Light Blue | Blue | White | Off-White | Off-White | Off-White | Off-White |
| Particle Morphology X | X:S- pherical;B- Curved;P- Peanut-shaped;T- Bulbous;C- Chain-like (aggregated state) | ||||||
| Stabilizing Ions | Organic/Inorganic Amines | ||||||
| Raw material Composition Y | Y:M-TMOS;E-TEOS;ME-TMOS+TEOS;EM-TEOS+TMOS | ||||||
| Metal Impurity Content | ≤300ppb | ||||||
Applications
Main application fields
| Application direction | Typical scenario |
| Semiconductor Manufacturing | Integrated Circuit (IC) Chips and Third Generation Semiconductor Materials |
| Optics and Display Technology | Optical glass, lens and display panel |
| Storage Devices | Hard disk platters and 3D NAND flash memory |
| Advanced Packaging | Wafer-level packaging (WLP), TSV (through silicon via) |
| Other high-end applications | MEMS (Micro-Electro-Mechanical Systems) and Medical Implants |
Ecological chain verification endorsement
Semixlab CMP polishing abrasives meet the semiconductor industry certification and have passed the ISO 14001/45001/9001 certification
Typical application process
Raw material → Abrasive Synthesis (Surface modification)→ Slurry Formulation (Filtration/PH adjustment)→ CMP polishing (EPD control)→ Post-Clean → Inspection (AFM/KLA)→ Data Feedback Optimization
Through process parameter optimization, Semixlab CMP polishing abrasive has achieved breakthrough progress in the field of domestic high-end semiconductor integrated circuit, gradually replaced imports in the semiconductor market, and has been successfully applied to the production and manufacturing of LCD, OLED and other display panels. If you need to obtain detailed technical white papers or arrange sample testing, please contact our technical support team.
Competitive Advantage
Semixlab CMP polishing abrasive core advantages
a.Freely adjustable particle diameter and degree of particle aggregation;
b.Monodisperse particles with uniform particle size distribution;
c.Stable dispersion system;
d.Large-scale production capability with minimal batch-to-batch variation;
e.Highly stable, resistant to agglomeration and sedimentation.
Our Services
Semixlab Product Shop
Semixlab CMP polishing abrasive shops
