High-Purity Graphite Heaters

Advanced Graphite Heating Solutions for High-Temperature Semiconductor Manufacturing

At Semixlab, we specialize in providing high-performance High-Purity Graphite Heaters designed for advanced semiconductor manufacturing processes, including SiC crystal growth, semiconductor epitaxy, CVD deposition, and high-temperature thermal treatment.

Our graphite heaters are manufactured from premium high-purity isotropic graphite and optimized for extreme thermal conditions, providing reliable performance in vacuum, inert gas, and high-temperature semiconductor processing systems.

Roles of High-Purity Graphite Heaters in Semiconductor Processes

① SiC Crystal Growth Process (PVT)

One of the most critical applications of High-Purity Graphite Heaters is SiC bulk crystal growth using the Physical Vapor Transport (PVT) method.

During SiC crystal growth, temperatures typically exceed: 2000℃

The graphite heater provides a stable thermal field required for:

● SiC powder sublimation

● Vapor transport control

● Seed crystal growth

● Crystal quality optimization

② Semiconductor Epitaxy Process

In epitaxial growth systems such as:

● MOCVD reactors

● SiC epitaxy equipment

● GaN epitaxy systems

graphite heaters provide precise wafer heating and temperature uniformity.

Their primary functions include:

● Maintaining wafer process temperature

● Improving epitaxial layer uniformity

● Supporting stable chemical reactions

③ CVD and High-Temperature Thermal Processing

High-Purity Graphite Heaters are also widely used in:

● CVD systems

● Annealing equipment

● Diffusion furnaces

● RTP systems

Why Choose Semixlab?

① Semiconductor-Grade Material Expertise

At Semixlab, we focus on advanced carbon and ceramic materials for semiconductor applications.

Our graphite solutions are developed with strict control over:

● Material purity

● Structural uniformity

● Surface quality

● Thermal performance

② Optimized Thermal Performance

Our graphite heaters provide Excellent Thermal Conductivity, Ensuring:

● Fast heating response

● Stable temperature distribution

● Outstanding Thermal Shock Resistance

Supporting:

● Frequent thermal cycling

● Long operating lifetime

● High Temperature Capability

③ Customized Design Capability

Semixlab provides customized graphite heater solutions according to customer requirements, including:

● Heater dimensions

● Power configuration

● Graphite grade selection

● Surface coating options

● Equipment compatibility

We support different semiconductor platforms and thermal processing systems with application-specific solutions.