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High Purity Soft Felt
Semixlab’s High Purity Soft Felt is specifically engineered for demanding high-temperature thermal field applications in semiconductor manufacturing. Produced from high-quality carbon-based precursors and purified through advanced processing, this soft felt material delivers ultra-low impurity levels, excellent thermal insulation, and outstanding structural adaptability. Its flexible structure allows precise fitting within complex thermal field designs, enabling optimized temperature gradients and stable process conditions. Looking forward to your inquiry.
Description
Why does purity matter in thermal fields? When producing third-generation?
semiconductors (SiC/GaN), traditional insulation felts with high ash content (over 500ppm) tend to release metallic impurities at temperatures above 1600°C. This causes lattice defects and lowers wafer yield.
Semixlab’s soft felt goes through our exclusive high-temperature chemical purification process, bringing the total impurity level down to less than 5ppm. This not only ensures a clean growth environment but also delivers the extreme thermal stability needed for long-cycle crystal growth.
Semixlab Edge
We are more than a supplier — we are your high-temperature zone partner.Founded by CAS researchers, we excel at combining insulation solutions with CVD coatings (TaC/SiC).We don’t just supply insulation felt; we optimize your full thermal field using graphite heaters and porous TaC to reduce energy consumption.Our in-house 5-axis CNC machining enables custom, pre-assembled kits that precisely match your furnace design with zero errors.
Specifications
| Properties | Premium PAN-Based Felt | High-Spec Viscose-Based Felt |
| Total Impurities | ≤5 ppm (GDMS) | ≤10 ppm |
| Carbon Content | ≥99.99% | ≥99.95% |
| Bulk Density | 0.10 - 0.15 g/cm³ | 0.08 - 0.12 g/cm³ |
| Thermal Cond. (@1000°C) | 0.12 - 0.15 W/m·K | 0.09 - 0.13 W/m·K |
| Max Service Temp. | 2800°C (Inert/Vacuum) | 2600°C (Inert/Vacuum) |
| Standard Thickness | 3mm / 5mm / 10mm / 20mm | 3mm / 5mm / 10mm / 20mm |
Applications
Critical Applications
Field-Proven Performance:
Engineered for SiC & Silicon growth (PVT/CZ), our felt acts as a thermal stabilizer to suppress crystal dislocations. In MOCVD/Epitaxy (compatible with Aixtron, NuFlare), it remains inert under corrosive H2/NH3 flows, blocking impurity diffusion. For Fiber Drawing and Sapphire Sintering, its zero-outgassing property ensures vacuum integrity and prevents yield loss.
Competitive Advantage
Core Advantages
Ultra-high purity (<5ppm), tested by GDMS. Strictly controlled Al, B, Fe and other key impurities to avoid cross-contamination in epitaxial growth.
Excellent thermal insulation: thermal conductivity as low as 0.12 W/m·K at 1000°C, reducing heat loss and controlling thermal gradient within ±1°C.
Low particle shedding: optimized fiber and surface treatment reduce dust in vacuum cycles, protecting CVD (TaC/SiC) graphite susceptors and heaters.
High flexibility and fit: soft and compressible for 360° seamless wrapping on complex furnaces, preventing thermal leaks from rigid insulation.
FAQ
Optimized FAQ
Q: How does Semixlab soft felt improve the service life of graphite heaters?
A: By providing a more stable thermal shield, our soft felt reduces the power load required by the heater to maintain target temperatures, thereby slowing down the carbon sublimation and oxidation of the graphite heating elements.
Q: Can your felt be used in high-flow gas environments?
A: Yes. For high-gas-velocity processes (like MOCVD), we recommend our high-density PAN-based felt or a hybrid solution with a graphite foil facing, which prevents fiber erosion and ensures zero particle contamination.
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