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High purity graphite soft felt
Quick Detail:
1. Other names: flexible graphite insulation felt, semiconductor thermal field soft felt,graphite felt.
2. Application: Thermal field insulation of semiconductor, photovoltaic equipment, vacuum high pressure gas quenching furnace, monoclistallin silicon furnace and other high temperature equipment insulation.
3. Core parameters: purity ≥99.99%, maximum tolerance temperature 3000℃, thermal conductivity 0.15-0.24W/m·K.
Description
Semixlab is a leading manufacturer of high purity graphite soft felt in China, focusing on providing high performance thermal insulation solutions for semiconductor, photovoltaic and high temperature industrial fields. This product adopts imported high-purity graphite raw material (impurity content ≤0.1%), made of fiber network structure through a special process, and has core characteristics such as ultra-low thermal conductivity (≤ 0.25W /m·K at 1000℃), extreme high temperature resistance (continuous use temperature of 3000℃) and chemical inertness, which is an ideal material for constructing precision thermal field system.
High-purity graphite soft felt is the core insulation material for the thermal field system of semiconductor and photovoltaic equipment. Through the precision weaving and stacking of high-purity graphite fibers, a porous structure with low thermal conductivity is formed. In high temperature environments (e.g., above 800 ℃), it significantly reduces heat loss by reflecting radiant heat and reducing the solid-phase heat transfer path.
According to the difference of raw materials, the products are divided into three categories:
PAN-based graphite soft felt: excellent mechanical properties, simple production process, widely used in structural support materials.
Viscose-based graphite soft felt: strong ablative resistance, high technical difficulty, suitable for high temperature heat insulation scene.
Pitch-based graphite soft felt: rich in raw materials, high carbonization yield, but the market application is narrow.
Specifications
| Data sheet for Semixlab high purity high purity graphite soft felt | ||||
| Index | Unit | XF-C series Soft Felt | ||
| XF-008 | XF-013 | |||
| Rayon-based | Pan-based | |||
| Density | g/cm3 | 0.08-0.11 | 0.12-0.14 | |
| Compression strength | MPa | / | / | |
| Thermal conductivity(1000℃) | W/m·K | 0.15 | 0.24 | |
| Ash (before purified) | ppm | ≤200 | ≤500 | |
| Processing temperature | ℃ | 2400℃ | 2400℃ | |
| Max service temperature | ℃ | 3000℃ | 3000℃ | |
| Dimension | mm | Width: ≤1600, Thickness: 5-10 | ||
| Application | Photovoltaic, Semiconductor, Sintering furnace, Metallurgical furnace | |||
| The above for standard products. if ultra-high purity products are required, need to be purified to ≤20ppm. | ||||
Applications
1. Semiconductor manufacturing equipment
Single crystal silicon growth system:
In CZ method single crystal furnace, the graphite heater and quartz crucible are wrapped to achieve accurate control of melt temperature gradient (axial temperature difference ≤2℃/cm) and ensure the stability of single crystal growth rate.
Silicon carbide crystal growth furnace:
When PVT method is used, the soft felt as the core insulation layer can increase the uniformity of axial thermal field in the furnace by 40%, and reduce the crystal defect rate to < 0.5/cm².
2. Photovoltaic industry equipment
Polycrystalline ingot furnace:
The modular assembly design improves the thermal efficiency of the furnace to 85%, which is 30% energy saving compared with the traditional carbon hard felt.
3. High temperature industrial equipment
The quenching cooling rate of the heat insulation lining in the heating chamber of the vacuum high pressure gas quenching furnace is increased by 20%.
The dynamic sealing system in the sintering zone of vacuum sintering furnace reduces argon gas consumption by 15%.
Competitive Advantage
Ultra-high purity: ash ≤500ppm, 200ppm, 20ppm, can be customized.
Extreme high temperature resistance: maximum operating temperature 3000℃.
Acid and alkali corrosion resistance: (PH 2-12), zero reactivity.
Technical solution customization: thermal field simulation + material selection joint design.
Differentiating advantages: 200% higher temperature resistance than traditional carbon felt, 50% lower thermal conductivity than competitive graphite felt, support dynamic sealing system integration.
